Vol 17, No 1 (2013) > Articles >

Electromagnetic Simulation for THz Antenna-Coupled Microbolometers Operated at Room Temperature

Makoto Aoki 1 , Masanori Takeda 1 , Norihisa Hiromoto 1


  1. Graduate School of Science and Technology, Shizuoka University, 3-5-1 Johoku, Naka-ku,Hamamatsu 432-8011, Japan


Abstract: Room-temperature terahertz (THz) detectors with higher performance are necessary for utilizing the THz wave in various sensing, spectroscopy and imaging, but even the best ones in the present are still insufficient for the practical applications. This issue is essential especially in the region around 1 THz at which there exists a large technology gap between microwave and middle-infrared. Therefore, we study to develop an antenna-coupled microbolometer to achieve a high-performance THz detector operated at a room-temperature for sensing at around 1 THz frequency wave. In this paper, we present several important features and results obtained from electromagnetic simulations, which help to design a structure of the antenna and heater to absorb efficiently the power of THz wave.
Keywords: detector, dipole antenna, electromagnetic simulation, microbolometer, terahertz (THz)
Published at: Vol 17, No 1 (2013) pages: 1-6

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K. Sakai (Ed.), Terahertz optoelectronics, Topics Appl. Phys. 97, Springer-Verlag, Berlin Heidelerg, 2005, p.350.

S.P. Mickan, X.-C. Zhang, Int. J. High Speed Elec. Sys. 13/2 (2003) 601.

R. Koehler, A. Tredicucci, F. Beltram, H.E. Beere, E.H. Linfield, A.G. Davies, D.A. Ritchie, R.C. Iotti, F. Rossi, Nature. 417 (2002) 156.

B.S. Williams, S. Kumar, H. Callebaut, Q. Hu, J.L. Reno, Appl. Phys. Lett. 83/11 (2003) 2124.

N. Karpowicz, H. Zhong, C. Zhang, K.-I Lin, J.-S. Hwang, J. Xu, X.-C. Zhang, Appl. Phys. Lett. 86/5 (2005) 054105.

K. Yamamoto, M. Yamaguchi, F. Miyamaru, M. Tani, M. Hangyo, Japan J. Appl. Phys. 43/3B (2004) L414.

H.-B. Liu, H. Zhong, N. Karpowicz, Y. Chen, X.-C. Cheng, Proc. IEEE 95/8 (2007) 1514.

K. Kawase, Y. Ogawa, Y. Watanabe, H. Inoue, Opt. Express. 11/20 (2003) 2549.

A.J. Fitzgerald, B.E. Cole, P.F. Taday, J. Pharm. Sci. 94/19 (2005) 177.

C. Joerdens, M. Koch, Opt. Eng. 47/3 (2008) 037003.

R.M. Woodward, B.E. Cole, V.P. Wallace, R.J. Pye, D.D. Arnone, E.H. Linfield, Michael Pepper, Phys. Med. Biol. 47 (2002) 3853.

M. Nagel, P.H. Bolivar, M. Brucherseifer, H. Kurz, A. Bosserhoff, R. Buttner, Appl. Phys. Lett. 80/1 (2002) 154.

N. S. Nishioka, P.L. Richards, D.P. Woody, Appl. Opt. 17 (1978) 1562.

P.R. Bratt, Semiconductors and Semimetals, vol. 12, In: R.K. Willardson, A.C. Beer (Eds.), Academic Press, New York, San Francisco, London, Chapter 2, 1977, p.482.

N. Hiromoto, M. Saito, H. Okuda, Jpn. J. Appl. Phys. 29 (1990) 1739.

A.G. Kazanskii, P.L. Richards, E.E. Haller, Appl. Phys. Lett. 31 (1977) 496.

N. Hiromoto, T. Itabe, H. Shibai, H. Matsuhara, T. Nakagawa, H. Okuda, Appl. Opt. 31 (1992) 460.

M. Aoki, S.R. Tripathi, M. Takeda, N. Hiromoto, Electron. Express. 9/5 (2012) 333.

D.P. Neikirk, W.W. Lam, D.B. Rutledge, Int. J. Infrared Millimeter Waves. 5/3 (1984) 245.

T. Uchida, K. Hayashi, T. Furuya, T. Tachiki, T. Idehara, Y. Yasuoka, The 33rd Int. Conf. Infrared Millimeter Terahertz Waves (IRMMW-THz 2008), Pasadena, CA, U.S.A., 2008.

F. Simoens, J. Lalanne-Dera, J. Meilhan, S. Pocas, D.T. Nguyen, J.-L. Ouvrier-Buffet, O. Cathabard, P. Gellie, S. Barbieri, The 36th Int. Conf. IR, MMW, and THz wavws (IRMMW-THz 2011), W2D.4, 2011.

C.M. Hanson, H.R. Beratan, R.A. Owen, M. Corbin, S. McKenney, Proceedings of SPIE Infrared Detectors: State of the Art. 1735. Ed. W. H. Makky, 1992, p.17.

R.A. Wood, C.J. Han, P.W. Kruse, Tech. Digest of IEEE Solid-State Sensor and Actuator Workshop, 1992, p.132.

N. Hiromoto, The 9th Takayanagi Kenjiro Memorial Symposium - 4th International Symposium on Nanovision Science, Nanospace Manipulation of Photon and Electrons for Nanovision Systems, (Hamamatsu Campus, Shizuoka Univ.), 30. Oct. 2007.

M. Konami, D.M. Pozar, D.H. Schaubert, IEEE Trans. Antenna Propagation, AP-33/6 (1985) 600.

D.B. Rutledge, D.P. Neikirk D.P. Kasilingam, In: Infrared and Millimeter Waves, vol. 10, K.J. Button (Ed.), Academic Press, New York, 1983, p.90.

Anon., Field Precision LLC, http://www.fieldp.com, 2011.

Anon., HFFS Industry Standard Enhanced, http:www.ansys.com, 2011