Vol 18, No 2 (2014) > Electrical and Electronics Engineering >

Adjustable Resonance Frequency of RF-MEMS Capacitor by Using Comb- Drive Actuators: A Design Approaches

Agus Santoso Tamsir 1 , Sandy Tannu Wijaya 2 , Dato’ Burhanuddin Yeop Majlis 3


  1. Head of MinaEMS-RG (Micro-Nano Electro-Mechanical System-Research Group), Department of Electrical Engineering, Universitas Indonesia, Depok 16424, Indonesia
  2. Department of Electrical Engineering, Faculty ofEngineering, Universitas Indonesia, Depok 16424, Indonesia
  3. Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, 43600 Bangi, Selangor, Malaysia


Abstract: The needs of smaller size RF varactor is a must today, and MEMS comes to be the potential one. In this paper we proposed an adjustable resonance RF-MEMS varactor by using comb-drive actuators placing in each side of the square movable plate. In our preliminary simulation, we found that the device can work properly but some constraints comes such as the dominancies of harmonic resonance frequencies that influences into the nominal capacitances. Therefore for the next step of development we have to find out the window of the structural dimension for a certain spans and a certain operating frequencies.
Keywords: capacitor, comb-drive actuators, resonance frequencies, RF-MEMS varactor
Published at: Vol 18, No 2 (2014) pages: 59-62

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