Vol 6, No 2 (2002) > Articles >

The Role of Si3N4 Amorphous Phase in nc-TiN/a-Si3N4 Nanocomposites in Increases the hardness and Thermal Stability

Keba Moto 1


  1. Jurusan Fisika FMIPA Universitas Indonesia, Depok, 16424 Jawa Barat


Abstract: The role of Si3N4 amorphous phase in  nc-TiN/a-Si3N4 nanocomposites will be shown and compared with polycrystalline ZrN/Ni which has no such amorphous phase (non-composites). The presence of amorphous phase Si3N4 increases the hardness of film as well as the toughness of the bulk nanocomposites under indentation load. It has been observed that nc-TiN/a-Si3N4 nanocomposites films has higher thermal stability than ZrN/Ni polycrystalline films.
Keywords: Nanokomposit, ZrN/Ni, fase amorf Si3N4
Published at: Vol 6, No 2 (2002) pages: 56-59

Access Counter: 886 views, 414 PDF downloads, .

Full PDF Download


E.O. Hall, Proceedings of Physic Society B 64 (1951) 747.

N.J. Petch, Journal of Iron and Steel Institute 25 (1953) 174

J. Schiotz, F.D. Di Tolla, K.W. Jacobsen, Nature 391 (1998) 561.

S. Yip, Nature 391 (1998) 352.

S. Veprek, S. Reiprich, Thin Solids Films 268 (1995) 64.

S. Veprek, M. Haussmann, S. Reiprich, J. Vac. Sci. Technol. A 14 (1996) 46.

S. Veprek, M. Haussmann, S. Li, Electrochem. Soc. Proc. 96 (1996) 619.

A. Niederhofer, T. Bolom, P. Nesladek, K. Moto, C. Eggs, D.S. Patil, S. Veprek, Surf. Coat. Technol. 146/147 (2001) 183.

S. Veprek, A. Niederhofer, K. Moto, T. Bolom, H.-D. Männling, P. Nesladek, G. Dollinger, A. Bergmaeir, Surf. Coat. Technol. 133/134 (2000) 152.

K. Moto, Ph.D. Thesis, Technical University Munich, Germany, 2001.

P. Kavankova, Technical University Munich, 2001, personal communication.

K. Moto, T. Bolom, S. Veprek, Proceeding of ICAMP, Singapore, 2002.

P. Karvancova, H.D. Männling, Ch. Eggs, S. Veprek, Programme Book ICMTF, San Diego, 2001 (Abstract No.800).