Vol 6, No 2 (2002) > Articles >

Development of Hardness Measurement Procedure for Nanocomposite nc-TiN/a-Si3N4

Keba Moto 1


  1. Jurusan Fisika FMIPA Universitas Indonesia, Depok, 16424 Jawa Barat


Abstract: Hardness of nc-TiN/a-Si3N4 nanocomposites which was determined by using two methods of measurements i. e. depth sensing method and remaining plastic indentation area that were magnified by using SEM (Scanning Electron Microscope) lie in the good agreement. The hardness value is not influenced by the biaxial and residual compressive stress. The measurement of the biaxial stress on the substrate shows a very small value of biaxial stress as well as the constant hardness and crystallite size against annealing temperature. Therefore, the reported hardness value here is the intrinsic value that depend on its microstructure properties.
Keywords: Nanokomposit, hardness, nanokomposit
Published at: Vol 6, No 2 (2002) pages: 80-82

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