Vol 17, No 1 (2013) > Articles >

Development of Seebeck-Coefficient Measurement Systems Using Kelvin-Probe Force Microscopy

Kazutoshi Miwa 1 , Faiz Salleh 2 , Hiroya Ikeda 1


  1. Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8011, Japan
  2. Research Fellow of the Japan Society for the Promotion of Science, 8 Ichibancho, Chiyoda-ku, Tokyo 102-8472, Japan


Abstract: Thermoelectric device is investigated by a number of researchers in order to enhance the thermoelectric efficiency. It is known that the efficiency can be improved by quantum effect. However, it is difficult to measure the thermoelectric characteristics of nanometer-scale structures. Thus a new measurement method is expected to be developed. We propose to apply Kelvin-probe force microscopy (KFM) to characterization of thermoelectric materials. KFM can locally observe surface potential of Fermi energy of a sample without touching the sample surface. In the present paper, we estimate the Seebeck coefficient of thin Si-on-insulator layers using KFM.
Keywords: Fermi energy, Kelvin-probe force microscopy, Seebeck coefficient
Published at: Vol 17, No 1 (2013) pages: 17-20

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